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Dispersion control in two-dimensional superlattice photonic crystal slab waveguides by atomic layer deposition

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4 Author(s)
Gaillot, D.P. ; School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, USA ; Graugnard, E. ; Blair, J. ; Summers, C.J.

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The frequency and dispersion of photonic bands in two-dimensional triangular-based superlattice photonic crystal Si slab waveguides were manipulated using atomic layer deposition. The samples were conformally coated with increasing thicknesses of TiO2 and characterized by polarized angular-dependent reflectance measurements, which revealed shifts in the photonic band frequencies of 16% as well as continuous changes in band dispersion. The ability to tune toward zero group velocity by tuning band repulsion between same-polarization bands is demonstrated. Finite-difference time-domain calculations, combined with a dielectric weighting model, were used to assess the observed band and dispersion tuning.

Published in:

Applied Physics Letters  (Volume:91 ,  Issue: 18 )