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Browse Journals & Magazines > Applied Physics Letters ...> Volume:91 Issue:14 Help

Large-area, ordered hexagonal arrays of nanoscale holes or dots from block copolymer templates

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6 Author(s)
Vedrine, Josee ; Department of Chemical Engineering, Princeton University, Princeton, New Jersey 08544, USA ; Hong, Young-Rae ; Marencic, Andrew P. ; Register, Richard A.
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Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2794010 

Hexagonal arrays of nanoscale holes or metal dots (25 nm in diameter and 39 nm in period), with orientational order extending over the entire square-centimeter array area, were fabricated on unpatterned silicon wafer substrates using a shear-aligned sphere-forming diblock copolymer template. Since two or more layers of spherical nanodomains are required to achieve alignment in the block copolymer film, but pattern transfer requires a single layer, a multistep etching process was developed, whereby the top layer of a shear-aligned bilayer was evenly removed, leaving the ordered bottom layer as the fabrication template for hole and dot arrays free from grain boundaries.

Published in:
Applied Physics Letters  (Volume:91 ,  Issue: 14 )

Date of Publication: Oct 2007

Page(s):
143110 - 143110-3
ISSN :
0003-6951
Digital Object Identifier :
10.1063/1.2794010
Date of Current Version :
18 June 2009
Issue Date :
Oct 2007

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