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Electrode architecture in tuning room temperature sensing kinetics of nanomicrointegrated hydrogen sensor

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5 Author(s)
Deshpande, Sameer ; Surface Engineering and Nanotechnology Facility (SNF), University of Central Florida, 4000 Central Florida Blvd., Orlando, Florida 32816; Advanced Materials Processing and Analysis Center (AMPAC), University of Central Florida, 4000 Central Florida Blvd., Orlando, Florida 32816; Nanoscience and Technology Center, University of Central Florida, 4000 Central Florida Blvd., Orlando, Florida 32816; and Mechanical, Material and, Aerospace Engineering (MMAE) Department, University of Central Florida, ; Seal, Sudipta ; Peng Zhang ; Cho, H.J.
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A diffusion model is proposed for elucidating the effect of interelectrode distance modulation on conductance change of a nanomicrointegrated hydrogen sensor at room temperature. Both theoretical and experimental results showed a faster response upon exposure to hydrogen when sensor electrode gap was smaller. Also, a linear increase in the sensor sensitivity from 500 to 80 000 was observed on increasing the electrode spacing from 2 to 20 μm. The improvement in sensitivity is attributed to the higher reactive sites available for the gaseous species to react on the sensor surface.

Published in:

Applied Physics Letters  (Volume:90 ,  Issue: 7 )