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Atmospheric-pressure argon/oxygen plasma-discharge source with a stepped electrode

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3 Author(s)
Lim, Jin-Pyo ; Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong, Youngtong-Gu, Suwon 443-749, Korea ; Uhm, Han S. ; Li, Shou-Zhe

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The nonequilibrium glow discharge in argon mixed with oxygen at atmospheric pressure was generated in a parallel plate reactor with a stepped electrode powered by a 13.56 MHz radio-frequency power supplier. The stepped-electrode reactor consists of a narrow and wide gap structure. A strong electric field occurred at the narrow gap region preionizes Ar/O2 gas and assists to generate a large volumetric plasma in the wide gap region. Therefore, the stepped-electrode reactor makes it easy to operate Ar/O2 glow discharge, providing a stable, uniform, and broad plasma jet at atmospheric pressure.

Published in:

Applied Physics Letters  (Volume:90 ,  Issue: 5 )