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Point contact reactions between Ni and Si nanowires and reactive epitaxial growth of axial nano-NiSi/Si

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6 Author(s)
Kuo-Chang Lu ; Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095-1595 ; Tu, K.N. ; Wu, W.W. ; Chen, L.J.
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Point contact reactions between a Si nanowire and a Ni nanowire are reported in which the Si nanowire is transformed into a single crystal NiSi with an epitaxial interface which has no misfit dislocation. The reactions were carried out in situ in an ultrahigh vacuum transmission electron microscope. The growth of the NiSi occurs by the dissolution of Ni into the Si nanowire and by interstitial diffusion from the point of contact to the epitaxial interface. The point contact reactions have enabled the authors to fabricate single crystal NiSi/Si/NiSi heterostructures of atomically sharp interfaces for nanoscale devices.

Published in:

Applied Physics Letters  (Volume:90 ,  Issue: 25 )

Date of Publication:

Jun 2007

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