(111)-textured 5%-Mn-substituted BiFeO3 (BFMO) thin films were fabricated on (111)-oriented SrRuO3(SRO)/Pt/Ti/SiO2/Si structures by chemical solution deposition. X-ray diffraction analyses (θ-2θ and pole figures) confirmed that SRO and BFMO films were highly (111) textured. High-resolution x-ray diffraction reciprocal space mapping showed that the crystal structure of the BFMO films was a rhombohedrally distorted perovskite structure. Transmission electron microscopy cross section images revealed that BFMO films were composed of columnar grains epitaxially aligned on the SRO grains. The remanent polarization of approximately 70 μC/cm2 and coercive field of approximately 300 kV/cm were observed at 900 kV/cm applied electric field in the (111)-textured BFMO thin films.