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Statistical method for thickness measurement of amorphous objects

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2 Author(s)
Van Dyck, D. ; EMAT, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium ; Croitoru, M.D.

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The authors propose a nondestructive method for the determination of the thickness of an amorphous sample. This method is based on the statistics of the phase of the electron exit wave function, which depend on the number of atoms traversed by the incident electron which itself is a function of the thickness of the object. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential.

Published in:

Applied Physics Letters  (Volume:90 ,  Issue: 24 )