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Flexural and torsional vibration modes in low temperature thin-film silicon paddle microresonators

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3 Author(s)
Adrega, T. ; INESC Microsistemas e Nanotecnologias (INESC MN), 1000-029 Lisbon, Portugal ; Chu, V. ; Conde, J.P.

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Electrostatically actuated paddle microresonators based on hydrogenated amorphous silicon were fabricated on glass substrates. The use of amorphous silicon as the structural material of a microelectromechanical device allows processing temperatures below 110 °C, offering the possibility of using large-area, low cost, and even flexible substrates. The microdevice geometry allows the excitation of flexural and torsional oscillations. Oscillation modes are distinguishable through the dependence of their resonance frequency on the length of the resonator’s paddle. Here the authors show resonance frequencies in the megahertz range and quality factors around 103. Parametric amplification was also observed with resonance peaks having quality factors reaching 104.

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Applied Physics Letters  (Volume:90 ,  Issue: 23 )