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Ferroelectric and pyroelectric properties of highly (110)-oriented Pb(Zr0.40Ti0.60)O3 thin films grown on Pt/LaNiO3/SiO2/Si substrates

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4 Author(s)
Guo, Yiping ; State Key Laboratory of MMCs, Shanghai Jiaotong University, Shanghai 200030, China ; Akai, D. ; Swada, Kzauaki ; Ishida, M.

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Pb(Zr0.4Ti0.6)O3 thin films with a thickness of 500 nm were spin coated on (110) preferred Pt bottom electrodes using a sol-gel method, in which the (110) preferred Pt bottom electrode was developed by using a (100)-oriented conductive oxide electrode LaNiO3 film as an adhesion layer on a SiO2/Si substrate. X-ray diffraction analysis and field emission scanning electron microscopy show that the as-grown Pb(Zr0.4Ti0.6)O3 films are highly (110)-oriented with a columnar structure. It indicates that the (110) preferred Pt bottom electrode is effective for growing highly (110)-oriented Pb(Zr0.4Ti0.6)O3 films. The as-grown Pb(Zr0.4Ti0.6)O3 films show excellent dielectric and ferroelectric properties with dielectric constant ε33T0=1620, loss tangent tan δ=2.1%, spontaneous polarization 2Ps=158 μC/cm2, and remnant polarization 2Pr=92 μC/cm2. Excellent pyroelectric properties are also detected in the (110)-oriented films. At room temperature, the pyroelectric coefficient and the figure of merit for detectivity can reach up to 7.8×10-4 C m-2 K-1 and 1.79×10-5 Pa-0.5, respectively.

Published in:

Applied Physics Letters  (Volume:90 ,  Issue: 23 )

Date of Publication:

Jun 2007

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