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Air-suspended two-dimensional polymer photonic crystal slab waveguides fabricated by nanoimprint lithography

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4 Author(s)
Choi, Choon-Gi ; IT Convergence and Components Laboratory (ICCL), Electronics and Telecommunications Research Institute (ETRI), Daejeon 305-700, Korea ; Young-Tak Han ; Jin Tae Kim ; Schift, Helmut

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2744482 

Air-suspended membrane-type photonic crystals were fabricated in polystyrene. The two-dimensional photonic crystal slab nanostructures were replicated by a thermal nanoimprint process, and then air-suspended membrane structures were generated by a selective sacrificial layer etch process. The optical transmission showed clear band gap characteristics at 1550 nm wavelength, which is in good agreement with the theoretical calculations.

Published in:

Applied Physics Letters  (Volume:90 ,  Issue: 22 )

Date of Publication:

May 2007

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