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ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications

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11 Author(s)
Yan, Z. ; Laboratory of Nano-Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai 200050, China; Department of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, China; and Materials Research Center, The Hong Kong Polytechnic University, Hong Kong, China ; Zhou, X.Y. ; Pang, G.K.H. ; Zhang, T.
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Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element (Au/ZnO/Pt) and a Bragg reflector (ZnO/Pt multilayer structure) has been fabricated by magnetron sputtering. The transmission electron microscopy and x-ray diffraction measurements revealed that all thin film layers in the device were well crystallized and highly textured. By electrical measurements, it was found that the device had a high resonant frequency (3.94 GHz) and mass sensitivity (8970 Hz cm2/ng). The use of the device as a biosensor was demonstrated by comparing the resonant properties of the device with/without coatings of biospecies.

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Applied Physics Letters  (Volume:90 ,  Issue: 14 )