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Simultaneous control of numerical enhancement of N atoms and decrease in heat flux into reaction chamber using ArN2 pulse-modulated induction thermal plasmas

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4 Author(s)
Tanaka, Y. ; Division of Electrical Engineering and Computer Science, Kanazawa University, Kakuma, Kanazawa, Ishikawa 920-1192, Japan ; Muroya, Takafumi ; Hayashi, Kouhei ; Uesugi, Y.

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A numerical enhancement of nitrogen atoms and a simultaneous decrease in heat flux flowing into the reaction chamber were found using a high-power ArN2 pulse-modulated induction thermal plasma. Optical emission spectroscopy was carried out to estimate the relative number of excited nitrogen atoms flowing into the reaction chamber. The relative heat flux into the reaction chamber was evaluated from surface temperature measurement of a metal specimen installed at the downstream portion of the plasma torch. Results showed that decreasing the shimmer current level, which means the modulation degree of the coil current, increases the number of excited nitrogen atoms, while the heat flux can be reduced compared to a conventional steady state induction thermal plasma.

Published in:

Applied Physics Letters  (Volume:89 ,  Issue: 3 )

Date of Publication:

Jul 2006

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