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BaTiO3SrTiO3 multilayer thin film electro-optic waveguide modulator

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7 Author(s)
Hiltunen, J. ; Technical Research Centre of Finland, Kaitovayla 1, FIN-90571 Oulu, Finland and Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139 ; Seneviratne, Dilan ; Sun, Rong ; Stolfi, Michael
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Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO3 (BTO)-SrTiO3 (STO) multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11 unit cells. Strip-loaded waveguides were formed by patterning a SixNy film deposited onto the BTO-STO stack while Al electrodes of 3 mm length and 13 μm separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73 pm/V at 1550 nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

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Applied Physics Letters  (Volume:89 ,  Issue: 24 )