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Achievement of ultrahigh quality factors in GaAs photonic crystal membrane nanocavity

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8 Author(s)
Weidner, Evelin ; Thales Research & Technology, Route Départementale 128, 91767 Palaiseau, France ; Combrie, S. ; Tran, Nguyen-Vi-Quynh ; De Rossi, A.
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The authors realized an ultrahigh quality factor nanocavity in a GaAs membrane with the highest loaded Q reported to date of 250 000 in a side-coupled cavity-waveguide system. This result could be obtained using an original aluminum-free material system combined with a carefully adjusted fabrication technology, yielding a device with small roughness and very good verticality of holes as well as small disorder. The authors show that the intrinsic Q factor is around 3.0×105 using a coupled-mode model.

Published in:
Applied Physics Letters  (Volume:89 ,  Issue: 22 )

Date of Publication: Nov 2006

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