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Thermally actuated untethered impact-driven locomotive microdevices

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5 Author(s)
Sul, O.J. ; Department of Physics and Astronomy, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599 ; Falvo, M.R. ; Taylor, R.M. ; Washburn, S.
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The authors have developed steerable locomotive devices as small as 30 μm using the inertial impact drive as the thrust method. The devices consist of three-legged, thin-metal-film bimorphs designed to rest on three sharp tips with the device body curved up off the surface. Rapid, thermally induced curvature of one leg leads to stepwise translation on a low friction surface. A focused laser was used to supply energy and its parameters controlled the velocity and direction of motion of the device.

Published in:

Applied Physics Letters  (Volume:89 ,  Issue: 20 )