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Photonic crystal waveguide switch with a microelectromechanical actuator

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3 Author(s)
Umemori, Ken-ichi ; Department of Nanomechanics, Tohoku University, Sendai 980-8579, Japan ; Kanamori, Y. ; Hane, K.

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A photonic crystal waveguide switch with a movable slab is proposed and fabricated by silicon micromachining. The switch structure consists of in-line input and output photonic crystal waveguide slabs and a switching slab to bridge gap between the waveguides. Driving the switching slab with a microelectromechanical actuator, the transmission between the waveguides is modulated. The switching characteristics can be explained by calculations using the finite-difference time-domain method.

Published in:

Applied Physics Letters  (Volume:89 ,  Issue: 2 )