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Model to determine the self-resonant frequency of micromachined spiral inductors

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3 Author(s)
Chen, C.C. ; Microsystems Integration Laboratory, Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan 300, Republic of China ; Lin, Cheng-De ; Cheng, Y.T.

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This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the “free electron” frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors.

Published in:

Applied Physics Letters  (Volume:89 ,  Issue: 10 )