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Anodic aluminum oxide membrane bonded on a silicon wafer for carbon nanotube field emitter arrays

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4 Author(s)
Jung, Hyun Young ; Nano Materials Laboratory, Department of Chemistry, Seoul National University, Shinlim-dong, San 56-1, Seoul 151-747, Republic of Korea ; Jung, Sung Mi ; Gu, Geun Hoi ; Suh, Jung Sang

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We have developed a method to bond a very thin anodic aluminum oxide membrane (400 nm thick) on a Si wafer. Furthermore, we were able to fabricate well-ordered carbon nanotube (CNT) arrays on the membrane at a very high temperature—above 1000 °C—without deformation. The CNT arrays fabricated at 800 °C exhibited long-term stability and uniform emission. Their current density was higher than 1 mA/cm2; such a density might be required for flat panel displays. When the tip of the CNTs was modified from an open shape to a closed shape by exposure to acetylene gas, the turn-on voltage decreased significantly and the enhancement factor increased significantly.

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Applied Physics Letters  (Volume:89 ,  Issue: 1 )