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Field emission characteristics of a graphite nanoneedle cathode and its application to scanning electron microscopy

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3 Author(s)
Neo, Yoichiro ; The Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan ; Mimura, Hidenori ; Matsumoto, Takahiro

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A high-brightness electron beam of more than 1011 A sr-1 m-2 was achieved from a graphite nanoneedle cathode, which was fabricated by simple hydrogen plasma etching of a graphite rod. A field emission was obtained at a high residual pressure of 10-6 Torr. The performance of this cold cathode was demonstrated by the fabrication of a scanning electron microscope, which was operated at a high residual pressure of 10-5–10-6 Torr. The brightness of this cathode offers a convenient field electron emission source that does not require a massive ultrahigh vacuum system.

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Applied Physics Letters  (Volume:88 ,  Issue: 7 )