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Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method

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4 Author(s)
Kang, Ghi Yuun ; Department of Ceramic Engineering, Yonsei University, 134, Shinchon-dong, Seodaemoon-ku, Seoul 120-749, Korea ; Bae, Sang-Woo ; Park, Hyung-Ho ; Tae Song Kim

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The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiNx/Ta/Pt/PZT/Pt/SiO2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

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Applied Physics Letters  (Volume:88 ,  Issue: 4 )