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Optical emission spectroscopy study for optimization of carbon nanotubes growth by a triode plasma chemical vapor deposition

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5 Author(s)
Lim, Sung Hoon ; Department of Information Display and Advanced Display Research Center, Kyung Hee University, Seoul 130-701, Korea ; Yoon, Hyun Sik ; Moon, Jong Hyun ; Park, Kyu Chang
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We carried out the in situ analysis of chemical species for the growth of carbon nanotubes (CNTs), deposited by a triode plasma enhanced chemical vapor deposition with a C2H2 and NH3 mixture, using optical emission spectroscopy (OES). A positive mesh bias enhances the radical density, thus increasing the growth rate. The vertically aligned CNTs were grown at a 50% C2H2 flow rate ratio to NH3 and mesh bias voltage of +300 V, resulting from the increased CH radical density and the decreased H and CN radical density through the OES analysis.

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Applied Physics Letters  (Volume:88 ,  Issue: 3 )