Cart (Loading....) | Create Account
Close category search window
 

Optical emission spectroscopy study for optimization of carbon nanotubes growth by a triode plasma chemical vapor deposition

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lim, Sung Hoon ; Department of Information Display and Advanced Display Research Center, Kyung Hee University, Seoul 130-701, Korea ; Yoon, Hyun Sik ; Moon, Jong Hyun ; Park, Kyu Chang
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2166690 

We carried out the in situ analysis of chemical species for the growth of carbon nanotubes (CNTs), deposited by a triode plasma enhanced chemical vapor deposition with a C2H2 and NH3 mixture, using optical emission spectroscopy (OES). A positive mesh bias enhances the radical density, thus increasing the growth rate. The vertically aligned CNTs were grown at a 50% C2H2 flow rate ratio to NH3 and mesh bias voltage of +300 V, resulting from the increased CH radical density and the decreased H and CN radical density through the OES analysis.

Published in:

Applied Physics Letters  (Volume:88 ,  Issue: 3 )

Date of Publication:

Jan 2006

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.