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Epitaxially grown WOx nanorod probes for sub-100 nm multiple-scanning-probe measurement

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5 Author(s)
Kubo, O. ; Nano System Functionality Center, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan ; Shingaya, Y. ; Nakaya, M. ; Aono, M.
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Tungsten suboxide (WOx) nanorods that are directly grown on electrochemically etched tungsten (W) tips are used as probes of a double-scanning-probe tunneling microscope. A WOx nanorod well acts as a scanning probe in tunneling microscopy and stable atomic-scale imaging is confirmed. For a contact nanoelectrode in measuring electrical properties of nanostructures, the WOx nanorod probe is coated with platinum. A series of resistance measurements of an erbium-disilicide nanowire as a function of interprobe distance down to 72 nm is realized.

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Applied Physics Letters  (Volume:88 ,  Issue: 25 )