(Mn, N)-codoped ZnO films were grown on fused silica substrates by reactive magnetron cosputtering. X-ray diffraction measurements reveal that the films have the single-phase wurtzite structure with c-axis preferred orientation. X-ray photoelectron spectroscopy studies indicate the incorporation of both divalent Mn2+ and trivalent N3- ions into ZnO lattice. Acceptor doping with nitrogen partly compensates the “native donors,” which results in a low electron concentration of 3.16×1016 cm-3 though p-type conductivity is not achieved. (Mn, N)-codoped ZnO films show significant ferromagnetism with Curie temperature above 300 K. The mechanism of ferromagnetic coupling in codoped ZnO is discussed based on a bound magnetic polaron model.