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5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

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5 Author(s)
Kirsch, P. ; Laboratoire de Physique des Milieux Ionisés et Applications, Université Henri Poincaré Nancy I, UMR 7040 CNRS, 54506 Vandoeuvre-lès-Nancy, France ; Assouar, M.B. ; Elmazria, O. ; Mortet, V.
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Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500 nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5 GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient.

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Applied Physics Letters  (Volume:88 ,  Issue: 22 )