Cart (Loading....) | Create Account
Close category search window

Second-harmonic generation from Si/SiO2/Hf(1-x)SixO2 structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Carriles, R. ; Department of Physics, University of Texas at Austin, Austin, Texas 78712-1081 ; Kwon, J. ; An, Y.Q. ; Miller, J.C.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link: 

Optical second-harmonic generation (SHG) is used to characterize thin films of Hf(1-x)SixO2 (x=0, 0.3, 0.45, 0.65, and 1) deposited by atomic layer epitaxy at 375 °C on Si substrates with 11 Å SiO2 buffer layers. Reflected SHG intensity measured at room temperature increases monotonically with Hf content for as-deposited samples and varies strongly with the temperature (600–1000 °C) of postdeposition rapid anneals in NH3. Spectroscopic analysis shows that the variable SHG component peaks at SH photon energy of 3.37 eV—the bulk silicon E1 critical point energy—a clear signature of electric-field-induced second-harmonic generation in the bulk Si space-charge region. The results suggest that SHG is a sensitive, potentially in situ, probe of internal electric fields attributable to composition- and annealing-dependent fixed charge in the oxide layers.

Published in:

Applied Physics Letters  (Volume:88 ,  Issue: 16 )

Date of Publication:

Apr 2006

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.