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Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

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5 Author(s)
Wang, Xuefeng ; Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, Illinois 61801 ; Vincent, Loren ; Bullen, David ; Zou, Jun
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This letter reports a special tip design for probes used in scanning probe lithography applications. The sidewalls of the pyramidal tip located at the distal end of a cantilever probe are modified to contain folded spring structures to reduce the overall force constant of the scanning probe. The spring structure is generated using focused ion beam milling method. We have conducted finite element simulation of the force constants of such folded springs under various geometries. We also demonstrated sub-100 nm scanning probe lithography using a modified spring tip in the dip pen nanolithography writing mode.

Published in:

Applied Physics Letters  (Volume:87 ,  Issue: 5 )

Date of Publication:

Aug 2005

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