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Cubic nitridation layers on sapphire substrate and their role in polarity selection of ZnO films

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9 Author(s)
Wang, Y. ; Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China ; Du, X.L. ; Mei, Z.X. ; Zeng, Z.Q.
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Well-defined cubic AlN ultrathin layers formed by nitridation of Al2O3 (0001) substrate at various temperatures were observed by high-resolution transmission electron microscopy. The polarity of the AlN layers strongly depends on the substrate pretreatment and nitridation temperature. The structure of the AlN layers plays a key role in polarity selection of subsequent ZnO films, and both Zn-polar and O-polar ZnO films could be steadily obtained by control of the cubic AlN layers.

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Applied Physics Letters  (Volume:87 ,  Issue: 5 )