Skip to Main Content
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2135385
We report the spontaneous formation of multilayer structures with nanometric periodicity during Ti–C thin-film growth by reactive magnetron sputtering. Their characterization was performed by transmission electron microscopy, x-ray photoelectron spectroscopy, x-ray diffraction, and secondary ion mass spectrometry. We discuss film structure and morphology as a function of metal content, and propose surface-directed spinodal decomposition as the mechanism responsible for the segregation of species in separated layers by up-hill diffusion.