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Wide-band transmittance of one-dimensional photonic crystals carved in Si3N4/SiO2 channel waveguides

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13 Author(s)
Gerace, D. ; Istituto Nazionale per la Fisica della Materia (INFM-CNR) and Dipartimento di Fisica “A. Volta,” Università di Pavia, via Bassi 6, I-27100 Pavia, Italy ; Galli, M. ; Bajoni, D. ; Guizzetti, G.
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Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3N4/SiO2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3N4/SiO2-based PhC waveguides for photonics applications from the infrared up to the visible range.

Published in:

Applied Physics Letters  (Volume:87 ,  Issue: 21 )

Date of Publication:

Nov 2005

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