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Imaging suspended carbon nanotubes in field-effect transistors configured with microfabricated slits for transmission electron microscopy

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4 Author(s)
Kim, Taekyung ; Department of Materials Science and Engineering, The Frederick Seitz Materials Research Laboratory and University of Illinois at Urbana-Champaign, Illinois 61801 ; Zuo, Jian-Min ; Olson, Eric A. ; Petrov, Ivan

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Field-effect transistors with carbon nanotubes (CNTs) suspended across etched slits and fabricated by chemical vapor deposition have been characterized by electrical measurements and transmission electron microscopy. Two devices are examined here: One is semiconducting from two single-wall CNTs, and the other is semiconducting and metallic, with a large off current, that comes from multiple nanotubes. The study highlights the importance of structural characterization in understanding the performance of CNT devices.

Published in:

Applied Physics Letters  (Volume:87 ,  Issue: 17 )