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45° polymer-based total internal reflection coupling mirrors for fully embedded intraboard guided wave optical interconnects

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6 Author(s)
Wang, Li ; Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78758 ; Wang, Xiaolong ; Jiang, Wei ; Jinho Choi
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An array of 50 μm×50 μm polymer waveguides with 45° total internal reflection (TIR) wideband coupling mirrors were fabricated by soft molding to achieve fully embedded boardlevel optoelectronic interconnects. The 45° TIR coupling mirrors were formed at the ends of the waveguides to provide surface normal light coupling between waveguides and optoelectronic devices. Three-dimensional optoelectronic interconnects were replicated in one-step transfer by the soft molding technique. The measured propagation loss of the multimode waveguide was 0.16 dB/cm at 850 nm wavelength. The coupling efficiency of the silver-coated 45° micromirrors buried under the top cladding was 92% with low polarization sensitivity.

Published in:

Applied Physics Letters  (Volume:87 ,  Issue: 14 )

Date of Publication:

Oct 2005

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