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An automatic measurement system for electromechanical characterization of silicon pressure sensors

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2 Author(s)
Shexin Gong ; Sherman Fairchild Center for Solid State Studies, Lehigh Univ., Bethlehem, PA, USA ; White, M.H.

This paper describes a unique, self-contained automated pressure sensor test system. The system is controlled by a SUN Sparc Station, with a custom-designed menu-driven user interface in the OPENWIN window environment. It is capable of performing multiparameter measurements including bridge resistance, bridge offset voltage, delta offset voltage, breakdown voltage and sensitivity. The built-in software package allows the user to perform statistical analysis with image capability. This system is applicable to both device research, where the “statistical” testing data provides the reliable experimental information, and device mass production, where the testing data and the generated wafer map can help in product sorting, quality control, and further processing

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:45 ,  Issue: 1 )

Date of Publication:

Feb 1996

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