Cryogenic operation of AlGaAs-GaAs vertical-cavity surface-emitting lasers at temperatures from 200 K to 6 K

We demonstrate for the first time the CW performance of AlGaAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) at cryogenic temperatures from 6 K to 200 K. By detuning the cavity mode with respect to the gain peak so that optimum dc lasing operation is achieved at -100 K, we find that this optimum lasing performance can be maintained down to temperatures as low as 6 K. Across a broad range of temperatures from 200 K to 6 K, the minimum threshold current of a 16-μm diameter VCSEL stayed below 4 mA, while its -3-dB modulation bandwidth increased by about 70% to 11 GHz at 6 K, and the external slope efficiency is greater than 70%.