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Integrated microwave power sensor

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6 Author(s)
Dehe, A. ; Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany ; Krozer, V. ; Fricke, K. ; Klingbeil, H.
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A new MMIC compatible sensor that measures RF power transmitted over a 50 Ω coplanar waveguide is presented. The sensor is based on the thermoelectric effect in AlGaAs and GaAs/AlGaAs micromachining technology is used for realisation. A sensitivity of 1.1 V/W has been achieved with a reflection coefficient of 0.1 at 10 GHz, by a first realisation

Published in:

Electronics Letters  (Volume:31 ,  Issue: 25 )

Date of Publication:

7 Dec 1995

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