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Surface-micromachined tunable three-dimensional solid Fabry-Perot etalons with dielectric coatings

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5 Author(s)
Shen, J.L. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Lin, L.Y. ; Lee, S.S. ; Wu, M.C.
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Tunable three-dimensional solid Fabry-Perot etalons with multilayer dielectric coatings have been successfully demonstrated. The out-of-plane etalon is monolithically integrated with a rotation stage using the surface-micromachining technique. A wavelength tuning range of 58.5 nm has been achieved at 1.3 μm wavelength using the on-chip rotation stage

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Electronics Letters  (Volume:31 ,  Issue: 25 )