By Topic

A Micromachined Inline-Type Wideband Microwave Power Sensor Based on GaAs MMIC Technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Lei Han ; Key Lab. of MEMS, Southeast Univ., Nanjing ; Qing-An Huang ; Xiao-Ping Liao ; Shi Su

Wideband 8-12-GHz inline-type microwave power sensors that are based on measuring the microwave power coupled from the coplanar waveguide line by a microelectromechanical systems membrane are presented. In this method, the signal is available during the power detection. In order to obtain the low reflection losses and insertion losses, as well as the wideband response of the power sensor, an impedance match structure and a compensating capacitance are proposed. The fabrication of the power sensor is compatible with the GaAs monolithic microwave integrated circuit (MMIC) process. The experimental results show that the sensor has reflection losses better than 20 dB and insertion losses less than 0.45 dB up to 12 GHz. A sensitivity of more than 30 muV/mW and a resolution of 0.2 mW are obtained at the 10-GHz frequency.

Published in:

Microelectromechanical Systems, Journal of  (Volume:18 ,  Issue: 3 )