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MMIC internal electric field mapping with submicrometre spatial resolution and gigahertz bandwidth by means of high frequency scanning force microscope testing

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2 Author(s)
Leyk, A. ; Fachgebiet Werkstoffe der Elektrotechnik, Gerhard-Mercator-Univ., Duisburg, Germany ; Kubalek, E.

High frequency scanning force microscope (HFSFM) testing enables, among other measurements, the probing of device internal electric potential distributions within monolithic microwave integrated circuits (MMICs) with both high spatial and temporal resolution. Two planar components of the electric field can be calculated from this data and their local distribution can be mapped. For the first time 2D distributions of electric field components on an interdigital capacitor within an MMIC at frequencies up to 6 GHz were evaluated from HFSFM potential measurements, demonstrating the submicrometre spatial resolution and gigahertz bandwidth of this new MMIC internal electric field mapping technique

Published in:

Electronics Letters  (Volume:31 ,  Issue: 24 )