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Low-voltage small-size double-arm MEMS actuator

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3 Author(s)
Biyikli, N. ; UNAM-Inst. of Mater. Sci. & Nanotechnol., Bilkent Univ., Bilkent ; Damgaci, Y. ; Cetiner, B.A.

The fabrication and characterisation of a double-arm cantilever-type metallic DC-contact MEMS actuator with low pull-down voltage are reported. Bi-layer TiW cantilevers with an internal stress gradient were fabricated using a microwave-compatible fabrication process. Owing to its small size, cantilever length (L = 5-50 mum) and width (W = 2-40 mum), i.e. ~10-100 times smaller in lateral dimensions than a standard MEMS actuator, this actuator showed actuation voltages lower than 10 V. RP measurements of the 10 mum-wide actuators yielded an average insertion loss less than 1 dB and isolation higher than 40 dB up to 25 GHz. The developed actuator is well suited for integration in reconfigurable microwave circuits and systems such as reconfigurable antennas and arrays.

Published in:

Electronics Letters  (Volume:45 ,  Issue: 7 )

Date of Publication:

March 26 2009

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