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Fully Differential Internal Electrostatic Transduction of a Lamé-Mode Resonator

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6 Author(s)

This paper reports the parallel internal electrostatic transduction of a laterally driven Lame-mode polysilicon resonator. This resonator is fabricated using a manufacturable double nanogap process that provides ultrathin high-aspect ratio lateral gaps. The transduction electrodes are optimally placed and oriented to maximize electromechanical transduction efficiency for the fundamental Lame mode. A 128.15 MHz Lame-mode resonator is driven and sensed differentially with a 20 V DC polarization voltage: the motional resistance is about 30 kOmega and the quality factor Q > 12000 in air.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009