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Air Pressure Sensor for an Insect Wing

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3 Author(s)
Hidetoshi Takahashi ; The University of Tokyo, Tokyo, JAPAN. ; Kiyoshi Matsumoto ; Isao Shimoyama

This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250 mum times 200 mum times 0.3 mum. The sensitivity to air pressure was 0.29 times 10-3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009