By Topic

Modeling of a Capacitive Σ-Δ MEMS Accelerometer System Including the Noise Components and Verification with Test Results

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Boga, B. ; Dept. of Electr. & Electron. Eng., Middle East Tech. Univ., Ankara ; Ocak, I.E. ; Kulah, H. ; Akin, T.

This paper presents a detailed SIMULINK model for a conventional capacitive Sigma-Delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full system, including the effect of individual noise components, operation range, scale factor, etc. The model has been verified through test results using a lateral accelerometer, full-custom designed 2nd-order Sigma-Delta readout electronics, and a signal processing unit implemented on PIC. The implemented system operates at 500 kHz sampling rate and has 0.53 V/g open-loop sensitivity, 58.7 mug/radicHz resolution, plusmn12 g operation range, and 0.97e-6 g/(output units) scale factor, where these numbers are in close agreement with the estimated results.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009