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A Novel Configurable MEMS Inertial Switch using Microscale Liquid-Metal Droplet

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2 Author(s)
Kwanghyun Yoo ; Dept. of Mech. Eng. of Sci. & Technol., POSTECH, Pohang ; Joonwon Kim

This paper presents a novel MEMS inertial switch using a microscale liquid-metal droplet as an active component. Our inertial switch is realized using the advantageous properties of the liquid-metal droplet (i.e., high surface tension, high density and electrical conduction) and the selectively modified contact surface. The modified contact surface contains microstructures which provide enhancement of non-wetting behavior as well as minimization of the contact angle hysteresis (CAH) of the liquid-metal droplet on the surface. Integrating the liquid-metal droplet, which is used as an inertial proof mass, inside the configured channel containing the microstructures on the surface, a dramatically simplified yet effective mechanism of inertial switch is realized. Various channel configurations can be designed for different threshold-levels of acceleration.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009

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