Cart (Loading....) | Create Account
Close category search window
 

A Low-Noise Oscillator based on a Multi-Membrane CMUT for High Sensitivity Resonant Chemical Sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Lee, H.J. ; Edward. L. Ginzton Lab., Stanford Univ., Stanford, CA ; Park, K.K. ; Cristman, P. ; Oralkan, O.
more authors

We present 17.5-MHz and 42.7-MHz low-noise Colpitts oscillators employing capacitive micromachined ultrasonic transducers (CMUTs), each composed of a thousand resonator cells electrically connected in parallel. The massive parallelism lowers the motional impedance, and thus, reduces frequency noise and provides better matching to low-noise oscillator topologies. The 42.7-MHz oscillator achieved a phase noise of -105 dBc/Hz and -148 dBc/Hz at offset frequencies of 1 kHz and 1 MHz, respectively in air. The performance is comparable to MEMS oscillators based on resonators with high Q in vacuum. The lowest Allan deviation of the oscillator was measured to be 4.7 times 10-9 implying a mass resolution of 0.96 attogram per membrane. In addition, using the 17.5-MHz CMUT resonator, the performance of the Colpitts topology is compared to that of the amplifier based oscillator topology.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.