Referenced Items are not available for this document.
The successful compensation of frequency drift in a mass-sensitive chemical microsensor is demonstrated. The proposed compensation method uses a periodic stiffness modulation, generated by a second feedback loop, to monitor the microresonator's quality factor (Q-factor). The Q-factor is solely obtained from frequency measurements and monitored along with the measurand-induced frequency shift during normal closed-loop sensor operation. This simultaneous measurement of Q-factor and frequency shift enables the compensation of frequency drift induced by environmental disturbances using the extracted Q-factor. The feasibility of drift compensation has been demonstrated by implementing the compensation scheme into a closed-loop chemical sensing system and performing gas-phase chemical measurements.
Published in:
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Date of Conference: 25-29 Jan. 2009
- Page(s):
- 284 - 287
- ISSN :
- 1084-6999
- E-ISBN :
- 978-1-4244-2978-3
- Print ISBN:
- 978-1-4244-2977-6
- INSPEC Accession Number:
- 10546430
- Conference Location :
- Sorrento
- Digital Object Identifier :
- 10.1109/MEMSYS.2009.4805374
- Product Type:
- Conference Publications
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