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Frequency Drift Compensation in Mass-Sensitive Chemical Sensors based on Periodic Stiffness Modulation

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7 Author(s)
Demirci, K.S. ; Sch. of Electr. and Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Seo, J.H. ; Truax, S. ; Beardslee, L.A.
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The successful compensation of frequency drift in a mass-sensitive chemical microsensor is demonstrated. The proposed compensation method uses a periodic stiffness modulation, generated by a second feedback loop, to monitor the microresonator's quality factor (Q-factor). The Q-factor is solely obtained from frequency measurements and monitored along with the measurand-induced frequency shift during normal closed-loop sensor operation. This simultaneous measurement of Q-factor and frequency shift enables the compensation of frequency drift induced by environmental disturbances using the extracted Q-factor. The feasibility of drift compensation has been demonstrated by implementing the compensation scheme into a closed-loop chemical sensing system and performing gas-phase chemical measurements.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009