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3D Magnetic Microactuator Made of Newly Developed Magnetically Modified Photocurable Polymer and Application to Swimming Micromachine and Microscrewpump

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2 Author(s)
Kobayashi, K. ; Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya ; Ikuta, K.

This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolithography to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity-increasing agent to maintain the particle dispersion. It was demonstrated that this polymer were rapidly fabricated into various complicated 3D magnetic microstructures using microstereolithography. Finally, a swimming micromachine and microscrewpump driven by magnetic force wirelessly were developed using screw-type microactuators made of the polymer with a diameter of submillimeter order.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009

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