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Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components

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5 Author(s)
Gaspar, J. ; Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg ; Held, J. ; Pedrini, G. ; Osten, W.
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The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques such as stroboscopic illumination, laser-deflection method and digital speckle interferometry.

Published in:

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Date of Conference:

25-29 Jan. 2009