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Oxygen Effects on a \hbox {He/O}_{2} Plasma Jet at Atmospheric Pressure

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2 Author(s)
Shouguo Wang ; Inst. of Microelectron., Chinese Acad. of Sci., Beijing ; Jun Wan

A plasma jet has been developed that operates using RF power and produces a stable homogeneous discharge of He/O2 at atmospheric pressure. An optical emission spectroscopy technique was used to observe the electronically excited species at the point 10 mm downstream from the nozzle generated by the He/O2 plasma jet, and the discharge characteristics for the gas mixture of He/O2 were studied with a current probe and a voltage probe. The results indicate that there is a relative optimum fraction of O2 in the He/O2 gas mixture from 0.5% to 1.5% for the relative larger intensity of the characteristic atomic oxygen line at 777 nm, the root-mean-square (rms) current and rms voltage of the discharge are also more sensitive to oxygen content than to total gas flow.

Published in:

IEEE Transactions on Plasma Science  (Volume:37 ,  Issue: 4 )