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Optical characterisation of photonic wire and photonic crystal waveguides fabricated using nanoimprint lithography

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9 Author(s)
Borel, Peter l. ; COM*DTU, Department of Communications, Optics and Materials, Nano*DTU, Technical University of Denmark, DK-2800 Kgs Lyngby, Denmark. pib@com.dtu.dk ; Frandsen, Lars H. ; Fage-Pedersen, Jacob ; Lavrinenko, A.V.
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We have characterised photonic-crystal and photonic-wire waveguides fabricated by thermal nanoimprint lithography. The structures, with feature sizes down below 20 nm, are benchmarked against similar structures defined by direct electron beam lithography.

Published in:

Optical Communications, 2006. ECOC 2006. European Conference on

Date of Conference:

24-28 Sept. 2006