By Topic

Integration of a MEMS Capacitive Sensor in a Wireless Transmitter

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Ramos, J. ; Dept. of Electr. & Electron. Eng., Univ. of Extremadura, Badajoz ; Luque, A. ; Quero, J.M.

The integration of multiple functionality in MEMS devices is explored in this paper. The goal of this approach is to maximize the integration level by simplifying the global system architecture. In this paper, a capacitive pressure sensor is also designed as a RF capacitor for radio telemetry. The experimental results validate this novel approach that opens new alternatives to single-device RF-sensor designs.

Published in:

Electron Devices, 2009. CDE 2009. Spanish Conference on

Date of Conference:

11-13 Feb. 2009