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Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal–Oxide Nanostructures and Nanoarchitectures

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3 Author(s)
Mariotti, D. ; Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba ; Bose, A.C. ; Ostrikov, K.

In this paper, we report on the fabrication of Mo-oxide nanostructures and nanoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of the process are important characteristics for nanomanufacturing, and AMPs offer such advantages. In addition, AMPs have shown the ability of promoting self-organization of nanostructures.

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Plasma Science, IEEE Transactions on  (Volume:37 ,  Issue: 6 )